Browse Articles

Converting SiO2 wafers to hydrophobic using chlorotrimethylsilane

Lee et al. | Aug 20, 2024

Converting SiO<sub>2</sub> wafers to hydrophobic using chlorotrimethylsilane

Semiconductors are the center of the fourth industrial revolution as they are key components for all electronics. Exposed wafers made of silicon (Si), which can easily oxidize, convert to silicon dioxide (SiO2). The surface of SiO2 wafers consists of many Si-OH bonds, allowing them to easily bond with water, resulting in a “wet” or hydrophilic condition. We sought to determine a way to modify the surface of SiO2 wafers to become hydrophobic to ensure safe wet cleaning.

Read More...